晶圆级扇入封装
WLCSP Structure
1M,Ball on Pad
1P1M,Ball on Pad w/ PI
2P1M,Ball on RDL w/o UBM
2P2M,Ball on RDL w/ UBM
Process Capabilities
WLCSP (8”and 12”)
Max. Die Size: 6x6mm
Wafer Thickness: 12”, Min.300μm
Dielectric Material: PI/PBO
UBM: Ti/Cu/Ni, Plated Cu
RDL Line/Space: min. 10um/10um
WLCSP Ball Pitch: 0.40mm or 0.50mm